Wafer Level - 3D-Geometry

Wafer Level - 3D-Geometry

  • Fully automated and computer controlled
  • Automated measurement of device surface characteristics
  • Measurement accuracy of ±1μm for x/y-axis and ± 0.1 μm for z-axis
  • Wafer scale for measurements high throughput
  • Application examples:
    • optical lenses
    • integrated 3D microsystems